제품명 : MFC_Digital-MFC-&-Meter
제품상세 :
Full Scale N2(SLPM) : 0.01~2,500
(2,000 SLPM 이상은 Option 사항으로 문의)
Accuray(%FS) : +,-0.25
Repeatability(%) : +,-0.25
Response Tim(sec) : <1
In/Out signal(Vdc/mA) : 0~5 or 4~20
Supply power(Vdc) : +15 or 24
Operaing Pressure(Psia) : 5~1300
Operating Temp.(oC) : 0~50
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(제품)
MD30C (0.01~30 SLPM)
MD100C (30~100 SLPM)
MD300C (100~300 SLPM)
MD500C (300~1000 SLPM)
MD600C (1000~1500 SLPM)
MD700C (1500~2000 SLPM)